Ultra-siab kub inert gas ncu yog cov cuab yeej tseem ceeb hauv kev lag luam uas yuav tsum tau ua kom kub kub hauv qhov chaw inert, kom ntseeg tau qhov zoo thiab kev ncaj ncees ntawm cov ntaub ntawv ua tiav. Nws muaj feem xyuam rau cov huab cua hauv inert gases xws li Argon, Carbon Dioxide, Helium, thiab Nitrogen. Qhov qhib-cua hnyav-gauge nichrome hlau rhaub cov ntsiab lus muab cov cua kub zoo txog li 600 degrees. Ib tug tshwj xeeb dual-plhaub tsim tso cai rau cov kev khiav ntawm coolant thiab ambient cua nyob ib ncig ntawm lub puab chamber uas muaj inert gas, tswj ruaj khov nyob rau hauv lub siab thiab kub.

Inert gas ncu yog qhov zoo tagnrho rau kev siv qhov cub uas muaj cov khoom siv hauv qhov chaw tswj, nrog rau kev ziab kom qhuav, wafer ziab, resin curing rau semiconductor ntim, thiab kev laus ntawm cov khoom siv hluav taws xob thiab cov khoom siv.

● 1 chamber los yog 2 chamber hom (standalone tswj rau txhua chamber)
● Max. 260 ℃
●O2 concentration qis dua 50ppm

Haum rau curing semiconductor wafers (photoresist PI, PBO, BCB curing), iav substrate ci, thiab high-precision annealing kev kho mob, thiab lwm yam.

Cov ncu huv yog siv dav hauv kev kho cua sov lossis ziab ntawm cov khoom siv hluav taws xob semiconductor wafers, kua muaju, disks thiab lwm yam khoom siv thiab cov khoom siv uas xav tau huab cua huv.

• ● Chav Kawm 100
• ● 350L muaj peev xwm loj
• ● Max. kub 260 ℃

• ● Lub tshuab nqus tsev ziab kom tshem tawm cov dej noo thiab hnyav hauv cov khoom siv electrode.
• ● Max. kub 300 ℃ / 400 ℃ yog nyob ntawm yeem
• ● Kev khiav hauj lwm lub tshuab nqus tsev ntau 101kPa -1Pa● Muaj 3 qhov ntau thiab tsawg, muaj peev xwm loj

Lub tshuab nqus tsev kom qhuav qhov cub loj tsim rau txhua yam ntawm lub tshuab nqus tsev kom qhuav.

• ● Max. kub 250 ℃
• ● Kev khiav hauj lwm lub tshuab nqus tsev ntau 101kPa -0.1kPa

Qhov cub no zoo tagnrho rau kev tshem tawm cov dej seem, cov kuab tshuaj lossis lwm cov tshuaj tsis haum los ntawm cov khoom kub-rhiab. Lub tshuab nqus tsev twj tso kua mis yuav raug ntsia rau hauv qhov qis qis ntawm qhov cub kom txuag tau qhov chaw nruab nrog ceev txuas flange piping. Hom qhov cub no tau siv dav hauv cov chaw sim, cov khoom siv hluav taws xob, MEMS, thiab cov khoom siv hluav taws xob.

Lub 9 chamber yog tswj nws tus kheej thiab sib koom ib txheej ntawm lub tshuab nqus tsev. Nws yog tsim rau txhua yam ntawm cov ntaub ntawv hlau, anaerobicanaerobic, tshuaj raw cov ntaub ntawv, precious hlau, hlau hmoov thiab lwm yam khoom, hmoov, muab tshuaj txhuam, kua, hluav taws xob khoom.

• ● 9-Chambers standalone tswj
• ● Khaws cov khoom ib ntus thaum lub sijhawm tsim cov khoom siv hluav taws xob, cov khoom siv hluav taws xob optoelectronic, semiconductor chips thiab lwm yam khoom siv los tiv thaiv oxidation
• ● Min.50 rau 5 * 10-5Pa nqus tsev vacuum
• ● Barcode scanner khaws cov ntaub ntawv khoom

GMS stainless hlau muaj qhov cub haum rau ntau yam kev siv thermal ua haujlwm txog 200 ℃. Cov qhov cub muaj qhov zoo tshaj plaws rau lub nruas cua sov, kev laus, tub ntxhais hardening, ziab, preheating, curing, thiab tivthaiv kuaj.

• ● Cov khoom siv stainless hlau kom haum rau kev cob qhia huv lossis ib puag ncig corrosive
• ● Max. Temp. 200 ° C
• ● Kev quab yuam convection hom

• ● Haum rau kev kho cua sov ntawm cov khoom
• ● Teem ntawm cov kab ntau lawm, lub qhov cub conveyor tau txhim kho cov khoom tsim tau zoo heev
• ● Tsis siv neeg tswj tag nrho
• ● Lub conveyor ceev yog adjustable thiab muaj peev xwm mus se ntau txoj kev kho mob
• ● Nruab nrog zaus converter, ceg txheem ntseeg teeb, lub tog raj kheej, thiab lwm yam.
• ● Tsis siv neeg thauj khoom thiab tshem tawm qhov system txuas nrog cov khoom siv hluav taws xob nce thiab nqis

Lub 9 chamber yog tswj nws tus kheej thiab sib koom ib txheej ntawm lub tshuab nqus tsev. Nws yog tsim rau txhua yam ntawm cov ntaub ntawv hlau, anaerobicanaerobic, tshuaj raw cov ntaub ntawv, precious hlau, hlau hmoov thiab lwm yam khoom, hmoov, muab tshuaj txhuam, kua, hluav taws xob khoom.

• ● 9-Chambers standalone tswj
• ● Khaws cov khoom ib ntus thaum lub sijhawm tsim cov khoom siv hluav taws xob, cov khoom siv hluav taws xob optoelectronic, semiconductor chips thiab lwm yam khoom siv los tiv thaiv oxidation
• ● Min.50 rau 5 * 10-5Pa nqus tsev vacuum
• ● Barcode scanner khaws cov ntaub ntawv khoom

Haum rau semiconductor ntim cov kev pab cuam ntu lossis kev sim hauv chav kuaj, rau resin curing.

Multi-chamber cub siv lub siab-volume kab rov tav cua recirculation system uas maximizes kub uniformity thiab kev ua tau zoo.

• ● Muaj rau 2/3/4/6 chamber ua ke (standalone tswj rau txhua chamber)
• ● Txuag qhov chaw teeb tsa
• ● Kab rov tav convection

GZ-RTP-SM-12 yog ib qho semi-automatic ntsug ceev ceev thermal ua tshuab siv rau cua sov ib leeg 4-12 nti wafer
Max. Temp. 1250 ℃
Max. 4 gas kab

• ● Haum rau kev kho cua sov ntawm cov khoom
• ● Teem ntawm cov kab ntau lawm, lub qhov cub conveyor tau txhim kho cov khoom tsim tau zoo heev
• ● Tsis siv neeg tswj tag nrho
• ● Lub conveyor ceev yog adjustable thiab muaj peev xwm mus se ntau txoj kev kho mob
• ● Nruab nrog zaus converter, ceg txheem ntseeg teeb, lub tog raj kheej, thiab lwm yam.
• ● Tsis siv neeg thauj khoom thiab tshem tawm qhov system txuas nrog cov khoom siv hluav taws xob nce thiab nqis

Cov khoom siv yog tsim los ntawm lub tshuab nqus tsev chamber thiab siab zaus plasma fais fab mov, lub tshuab nqus tsev, kev nce nqi, kev tswj tsis siv neeg thiab lwm yam. Lub hauv paus ntsiab lus ntawm kev ua haujlwm yog nyob rau hauv lub tshuab nqus tsev, siv lub tshuab nqus tsev twj rau lub tshuab nqus tsev studio kom ua tiav lub tshuab nqus tsev ntawm 0.15-0.3 mbar, thiab tom qab ntawd hauv lub luag haujlwm ntawm lub tshuab hluav taws xob ntau zaus, cov roj yuav raug ionized, tsim. ntawm plasma (lub xeev plaub ntawm qhov teeb meem), thiab tom qab ntawd siv cov ntshav rau ntawm qhov chaw ntawm kev kho workpiece.

• ● Plasma system-tes tshuab
• ● Nws tuaj yeem siv tsis tu ncua nyob rau hauv ib puag ncig kev tsim khoom los ntxuav thiab qhib qhov chaw ntawm qhov chaw tsis zoo
• ● Lub tshuab nqus tsev vacuum

GZ ceev ceev cov av noo noo pov thawj txee txais cov tshiab hloov tshiab dehumidification module. Nws tuaj yeem ncav cuag cov av qis dua 5% RH. Cov khoom yog yooj yim rau kev khiav lag luam. Nws yog qhov tshwj xeeb tshaj yog pom zoo rau txhua yam khoom siv hluav taws xob, lub koob yees duab, lub koob yees duab, cov cuab yeej kuaj dav dav, lub tshuab tsom, cov khoom siv thiab tshuaj, thiab lwm yam. kom tiv thaiv pwm thiab pwm.

ESD cov txee qhuav yog ib qho cuab yeej tseem ceeb hauv txhua qhov chaw uas cov khoom siv hluav taws xob nkag siab zoo, ua kom lawv lub neej ntev thiab kev ua tau zoo los ntawm kev tiv thaiv lawv los ntawm kev puas tsuaj los ntawm hluav taws xob zoo li qub. Sab hauv ntawm lub txee feem ntau yog kab nrog ESD-kev nyab xeeb cov ntaub ntawv, xws li anti-static foam los yog conductive yas bins, los muab kev tiv thaiv ntxiv rau cov khoom khaws cia.

Nitrogen txee tuaj yeem pab tswj kev sib kis los ntawm cov plua plav, cov khoom, thiab lwm yam impurities uas tuaj yeem cuam tshuam kev ua haujlwm thiab kev ntseeg siab ntawm semicon thiab electronics ntau lawm. Qhov huv huv nitrogen ib puag ncig tswj cov purity ntawm cov khoom thiab qhov chaw thaum lub sij hawm tsim khoom. Rau qee lub sijhawm hauv chav kawm 100 (ISO 5) kev huv huv ib puag ncig, tag nrho daim iav stainless hlau qhuav txee yog siv los khaws cov khoom thiab cov cuab yeej.

Stainless hlau nitrogen lub txee yog ib qho tshwj xeeb cia tshuaj tsim los tiv thaiv cov khoom rhiab thiab cov ntaub ntawv los ntawm oxidation thiab ya raws kev puas tsuaj los ntawm kev tswj cov cua inert nitrogen. Stainless hlau txee yog tsim los ntawm cov khoom zoo 304 stainless hlau, uas muaj kev tiv thaiv corrosion zoo heev thiab yooj yim los ntxuav. Cov iav ua tiav tsis yog tsuas yog muab lub ntsej muag niaj hnub tab sis kuj tseem pab tu thiab tu. Kev ua tiav ntawm qhov chaw siab thiab qhov yooj yim-rau-huv ntawm cov khoom no ua rau lawv tsim nyog rau qhov chaw huv huv, nrog qee cov qauv txawm tias ua tau raws li tus qauv kev huv ntawm Chav Kawm 100

Stainless hlau nitrogen txee yog feem ntau siv nyob rau hauv semiconductor, photonics thiab FPD industries, tshwj xeeb cov ntaub ntawv cia thiab hluav taws xob sectors los tiv thaiv oxidation, tawm tsam ntawm txawv teb chaws lub cev thiab cov av noo tswj nyob rau hauv ib tug huv cheeb tsam.

Lub txee yog tsim los rau siab tshaj plaws load thiab durability, Stainless hlau nitrogen txee yog ntsia nrog ib tug nitrogen inlet mus ntxuav chaw ua hauj lwm, thiaj li tiv thaiv cov khoom cia los ntawm oxidized, tag nrho N2 qhuav txee yog tsim los ntawm SUS # 304.

Los ntawm kev tswj cov av noo qis, cov khoom siv nitrogen pab txo qis cov dej noo thaum lub sijhawm khaws cia thiab ua cov khoom siv IC. Nws tuaj yeem txhim kho kev sib koom ua ke zoo los ntawm kev txo cov oxidation thiab ua kom muaj kev sib txuas huv, txhim khu kev qha. Qhov no yog ib qho tseem ceeb rau kev tiv thaiv corrosion, delamination, los yog lwm yam kev puas tsuaj uas cuam tshuam rau kev ntseeg siab ntawm IC pob.

• ● Humidity Range: 1-60% RH
• ● Muaj peev xwm: 500/1020/1250/1510L
• ● ESD Safe