Mavuni a gasi omwe amawotcha kwambiri kutentha kwambiri ndi zida zofunika kwambiri m'mafakitale pomwe kutentha kwapang'onopang'ono kumafunikira, kuwonetsetsa kuti zinthu zomwe zikukonzedwazo zili bwino komanso kukhulupirika. Imagwiritsidwa ntchito mumlengalenga mumipweya yopanda mpweya monga Argon, Carbon Dioxide, Helium, ndi Nayitrogeni. Zinthu zoyatsira waya zokulirapo za nichrome zimapereka kutentha kwamphamvu mpaka madigiri 600. Mapangidwe apadera a zipolopolo ziwiri amalola kuti mpweya wozizirira komanso wozungulira uziyenda mozungulira chipinda chamkati chodzaza ndi mpweya wa inert, ndikusunga kukhazikika kwamkati ndi kutentha.

Mavuvuni a gasi a inert ndiabwino pazogwiritsa ntchito mu uvuni wamafakitale womwe umaphatikizapo kukonza zinthu m'malo olamuliridwa, kuphatikiza kuyanika kwa chinyezi, kuyanika kwawafa, kuchiritsa kwa utomoni pakuyika kwa semiconductor, ndi kukalamba kwa zida zamagetsi ndi zida.

● Chipinda chimodzi kapena mitundu iwiri ya zipinda (zowongolera zoyima pachipinda chilichonse)
● Max. 260 ℃
● Kukhazikika kwa O2 pansi pa 50ppm

Oyenera kuchiza zowotcha za semiconductor (photoresist PI, PBO, BCB kuchiritsa), kuphika kwagalasi gawo lapansi, ndi chithandizo chapamwamba kwambiri cha annealing, ndi zina zambiri.

Mavuni oyera amagwiritsidwa ntchito kwambiri pochiza kutentha kapena kuyanika ma semiconductor wafers, makhiristo amadzimadzi, ma disks ndi zida zina ndi zida zomwe zimafunikira mpweya wabwino.

• ● Kalasi 100
• ● 350L mphamvu yaikulu
• ● Max. kutentha 260 ℃

• ● Unikani kuunika kuti muchotse chinyezi ndi zosungunulira mu ma elekitirodi.
• ● Max. kutentha 300 ℃/400 ℃ ndi kusankha
• ● Vacuum range 101kPa -1Pa ● Ipezeka mu makulidwe 3, mphamvu yayikulu

Chivundikiro chachikulu choyanika vacuum chopangidwira mitundu yonse yamitundu yowumitsa vacuum.

• ● Max. kutentha 250 ℃
• ● Mulingo wa vacuum 101kPa -0.1kPa

Uvuniwu ndi wabwino pochotsa madzi otsalira, zosungunulira kapena zinthu zina zosakhazikika kuchokera kuzinthu zomwe sizimva kutentha. Pampu ya vacuum imayikidwa pansi pa uvuni kuti musunge malo oyikapo ndi mapaipi olumikizana mwachangu. Uvuni wamtunduwu umagwiritsidwa ntchito kwambiri m'ma lab, semiconductor, MEMS, ndi dera lamagetsi.

Zipinda 9 zimayendetsedwa paokha ndikugawana seti imodzi ya vacuum system. Ndi oyenera mitundu yonse ya zipangizo zitsulo, anaerobicanaerobic, mankhwala zopangira, zitsulo zamtengo wapatali, zitsulo ufa ndi zina olimba, ufa, phala, madzi, zinthu zamagetsi

• ● 9-Chambers standalone control
• ● Sungani zinthu kwakanthawi popanga zida zamagetsi, zida za optoelectronic, tchipisi ta semiconductor ndi zida zina kuti mupewe oxidation.
• ● Min.50 mpaka 5*10-5Pa vacuum
• ● Barcode scanner kuti musunge zambiri zamalonda

Mavuni osapanga dzimbiri a GMS amakhala ndi ntchito zosiyanasiyana zopangira matenthedwe mpaka 200 ℃. Mavuvuni akumafakitale ndi oyenera kutenthetsa ng'oma, kukalamba, kuumitsa pakati, kuyanika, kutentha, kuchiritsa, ndi kuyesa zigawo.

• ● Chitsulo chosapanga dzimbiri kuti chigwirizane ndi malo aukhondo kapena malo owononga
• ● Max. Temp. 200 ° C
• ● Mtundu wa convection wokakamizidwa

• ● Oyenera mankhwala matenthedwe mankhwala
• ● Atakhala pa mzere kupanga, uvuni conveyor patsogolo kupanga bwino kwambiri
• ● Kuwongolera kwathunthu
• ● The conveyor liwiro ndi chosinthika ndi amatha se angapo mankhwala ndondomeko
• ● Zokhala ndi ma frequency converter, stake light, silinda, ndi zina zotero.
• ● Makina odzaza ndi kutsitsa makina kuti agwirizane ndi zida zamtunda ndi zotsika

Zipinda 9 zimayendetsedwa paokha ndikugawana seti imodzi ya vacuum system. Ndi oyenera mitundu yonse ya zipangizo zitsulo, anaerobicanaerobic, mankhwala zopangira, zitsulo zamtengo wapatali, zitsulo ufa ndi zina olimba, ufa, phala, madzi, zinthu zamagetsi

• ● 9-Chambers standalone control
• ● Sungani zinthu kwakanthawi popanga zida zamagetsi, zida za optoelectronic, tchipisi ta semiconductor ndi zida zina kuti mupewe oxidation.
• ● Min.50 mpaka 5*10-5Pa vacuum
• ● Barcode scanner kuti musunge zambiri zamalonda

Oyenera gawo la semiconductor packaging pulogalamu kapena kuyesa mu labu, pochiritsa utomoni.

Ovuni ya Multi-Chamber imagwiritsa ntchito makina opingasa kwambiri omwe amawonjezera kutentha komanso magwiridwe antchito.

• ● Kupezeka kwa 2/3/4/6 chipinda chophatikizira (chizindikiro choyimirira pachipinda chilichonse)
• ● Kusunga malo oikapo
• ● Njira yopingasa

GZ-RTP-SM-12 ndi semi-automatic ofukula mofulumira matenthedwe kachitidwe kamene kamagwiritsidwa ntchito powotcha imodzi 4-12 inch wafer.
Max. Temp. 1250 ℃
Max. 4 mizere ya gasi

• ● Oyenera mankhwala matenthedwe mankhwala
• ● Atakhala pa mzere kupanga, uvuni conveyor patsogolo kupanga bwino kwambiri
• ● Kuwongolera kwathunthu
• ● The conveyor liwiro ndi chosinthika ndi amatha se angapo mankhwala ndondomeko
• ● Zokhala ndi ma frequency converter, stake light, silinda, ndi zina zotero.
• ● Makina odzaza ndi kutsitsa makina kuti agwirizane ndi zida zamtunda ndi zotsika

Zidazi zimapangidwa ndi chipinda cha vacuum ndi magetsi a plasma apamwamba kwambiri, vacuum system, inflation system, automatic control system ndi zina. Mfundo yofunikira ya ntchitoyi ili pamalo opanda phokoso, kugwiritsa ntchito mapampu a vacuum kuti mutulutse situdiyo kuti mukwaniritse mpweya wa 0.15-0.3 mbar, ndiyeno mu gawo la jenereta yothamanga kwambiri, mpweya udzakhala ionized, mapangidwe. plasma (gawo lachinayi la zinthu), ndiyeno kugwiritsa ntchito madzi a m'magazi pamwamba pa chithandizo cha workpiece.

• ● Makina ogwiritsira ntchito plasma
• ● Itha kugwiritsidwa ntchito nthawi zonse m'malo opangira zinthu kuyeretsa ndi kuyambitsa zida zowoneka modabwitsa.
• ● Chipinda chounikira

Kabati yotsimikizira chinyezi cha GZ yotsika pang'ono imatengera gawo latsopanoli la dehumidification. Imatha kufikira chinyezi pansi pa 5% RH. Mankhwalawa ndi osavuta kugwiritsa ntchito. Ndikofunikira makamaka kwa mitundu yonse ya zida zamagetsi, makamera, makamera, zida zonse za labotale, maikulosikopu, zida ndi mankhwala, etc.kuteteza nkhungu ndi mildew.

Makabati owuma a ESD ndi chida chofunikira m'malo aliwonse pomwe zida zamagetsi zamagetsi zimagwiridwa, kuwonetsetsa moyo wawo wautali komanso magwiridwe antchito awo powateteza ku zovuta zomwe zingawononge magetsi osasunthika. Mkati mwa nduna nthawi zambiri mumakhala ndi zida zotetezedwa za ESD, monga anti-static foam kapena ma bin apulasitiki oyendetsa, kuti apereke chitetezo chowonjezera pazinthu zosungidwa.

Makabati a nayitrojeni amatha kuthandizira kuwongolera kuipitsidwa kuchokera ku fumbi, tinthu tating'onoting'ono, ndi zonyansa zina zomwe zingakhudze magwiridwe antchito ndi kudalirika kwa semicon ndi kupanga zamagetsi. Malo oyera a nayitrogeni amasunga chiyero cha zigawo ndi malo panthawi yopanga. Nthawi zina zaukhondo wa kalasi 100 (ISO 5), kabati yowuma ya chitsulo chosapanga dzimbiri imagwiritsidwa ntchito kusunga zida ndi zida zenizeni.

Kabati yachitsulo chosapanga dzimbiri ya nayitrogeni ndi njira yosungiramo mwapadera yomwe idapangidwa kuti iteteze zida ndi zinthu zomwe zimakhudzidwa ndi okosijeni ndi kuwonongeka kwa chinyezi posunga mpweya wa nayitrogeni. Makabati osapanga dzimbiri amapangidwa kuchokera ku zitsulo zosapanga dzimbiri 304, zomwe zimapereka kukana kwa dzimbiri komanso ndizosavuta kuyeretsa. Kutsirizitsa kowoneka bwino sikumangopereka mawonekedwe amakono komanso kumathandizira kuyeretsa ndi kukonza. Kumapeto kwapamwamba komanso kuyeretsa kosavuta kwa makabati awa kumawapangitsa kukhala oyenera malo azipinda zaukhondo, okhala ndi mitundu ina mpaka amakwaniritsa ukhondo wa Class 100.

Kabati yachitsulo chosapanga dzimbiri ya nayitrogeni imagwiritsidwa ntchito kwambiri m'mafakitale a semiconductor, photonics ndi FPD, zida zapadera zosungiramo zinthu komanso magawo amagetsi kuti ateteze makutidwe ndi okosijeni, kuukira kwa matupi akunja komanso kuwongolera chinyezi m'malo oyera.

Kabatiyi idapangidwa kuti ikhale yolemetsa komanso yolimba, kabati yachitsulo chosapanga dzimbiri ya nayitrogeni imayikidwa ndi cholowera cha nayitrogeni kuti achotse malo ogwirira ntchito, kuti ateteze zinthu zosungirako kuti zisawonongeke, kabati yonse yowuma ya N2 imapangidwa ndi SUS#304.

Pokhala ndi chinyezi chochepa, makabati a nayitrogeni amathandizira kuchepetsa kuwonekera kwa chinyezi panthawi yosungira ndi kukonza zida za IC. Ikhoza kupititsa patsogolo ubwino wa solder pochepetsa makutidwe ndi okosijeni ndikuwonetsetsa kuti maulumikizidwe oyera ndi odalirika. Izi ndizofunikira popewa dzimbiri, delamination, kapena zolakwika zina zokhudzana ndi chinyezi zomwe zingakhudze kudalirika kwa phukusi la IC.

• ● Chinyezi Chosiyanasiyana: 1-60%RH
• ● Mphamvu: 500/1020/1250/1510Liter
• ● ESD Safe