Plasma Cleaner

Products Categories

Semi-Automatic Rapid Thermal Processing Furnace

1020L Sustainless Steel Nitrogen Cabinet

1250L Sustainless Steel Nitrogen Cabinet

1510L Sustainless Steel Nitrogen Cabinet

1510L ESD Safe Nitrogen Cabinet

350L large capacity Vertical Clean Oven

Trolley, Roll in Truck in Industrial Ovens

Ultra-High Temperature Inert (Anaerobic) Gas Oven

Plasma Surface Treatment Machine

The equipment is mainly composed of vacuum chamber and high frequency plasma power supply, vacuum system, inflation system, automatic control system and other parts. The basic principle of the work is in a vacuum state, the use of vacuum pumps to vacuum the studio to achieve a vacuum of 0.15-0.3 mbar, and then in the role of high-frequency generator, the gas will be ionized, the formation of plasma (the fourth state of matter), and then the use of plasma on the surface of the workpiece treatment.

● Plasma system-handing machine
● It can be used consistently in a manufacturing environment to clean and activate the surface of oddly shaped parts
● Vacuum chamber

FEATURESproduct

The remarkable feature of the plasma state is the high uniformity of the glow discharge, which emits visible light in colors ranging from blue to deep purple depending on the gas, and the material is treated at temperatures close to room temperature. These highly active microparticles interact with the treated surface to obtain a variety of surface modifications such as surface hydrophilicity, water repellency, low friction, high cleanliness, activation, etching, and so on.

● In semiconductor processing, plasma cleaning is commonly used to prepare a wafer surface prior to wire bonding. Removing contamination (flux) strengthens the bond adhesion, which helps extend device reliability and longevity.

● In biomedical applications, plasma cleaning is useful for achieving compatibility between synthetic biomaterials and natural tissues. Surface modification minimizes adverse reactions such as inflammation, infection, and thrombosis formation.

Parametersproduct

Model	GZ-DZ-PT3000
Size
Machine Size	W1250mmD1150mmH2020mm with alarm light)
Weight	550kg
Chamber
Material	Nickel-coated aluminum
Inner cavity size	W500D600H500mm
Volume	150L
Shelves	W450*D500, 6 layers
Vacuum System
Vacuum pump output power	dry pump
Vacuum Indicator	1.0×10^5 ～1×10^-1 Pa
Process pressure range	10-100pa
Vacuum extraction time	≤100s
Gas Lines
Process gas type	Argon, Nitrogen, or others
Gas Input	2 inputs, more can be add as requested
RF Generator
RF output power	1000W
RF Frequency	RF 13.56MHZ, power 1000W can be set
Controller
Control	PLC+ 8 inch Interface
Standards	RS485 or RS232 communication or as request Clean room ready CE

Applicationsproduct

■ Wire bond surface preparation on modules.

■ Cleaning before transfer molding on modules or underfilling.

■ Surface treatment for PCB or BGA substrates.

■ Removing contaminants (flux) or sterilizing a surface.

■ Promoting adhesion between two surfaces.

■ Controlling surface tension to achieve either a hydrophobic or hydrophilic surface.

■ Increasing biocompatibility.

■ Improving polymer performance through cross-linking to decrease friction that wears out devices.

Serviceproduct

GMS Industrial has markets, sales, technical service and network team to provide customers and dealers with comprehensive pre-sales, in-sales and after-sales services. You can communicate with us if you have any questions and requirements.
24 hours online. Messages will be replied as soon as they are received.

inquiry now