Amashyiga ya gazi yubushyuhe bukabije ni ibikoresho byingenzi mu nganda aho hasabwa gutunganya ubushyuhe bwo hejuru mu kirere cya inert, bigatuma ubwiza n’ubusugire bw’ibikoresho bitunganywa. Irakoreshwa mukirere muri gaze ya inert nka Argon, Dioxyde de Carbone, Helium, na Azote. Gufungura ikirere kiremereye-nichrome insinga zishyushya zitanga isoko ikomeye yubushyuhe bugera kuri dogere 600. Igishushanyo kidasanzwe cyibishushanyo mbonera cyemerera kuzenguruka umwuka ukonje kandi udukikije ukikije icyumba cyimbere cyuzuye gaze ya inert, bikomeza umuvuduko wimbere nubushyuhe.

Amashyiga ya gaz ni meza kubikorwa byo gutanura mu nganda birimo ibikoresho byo gutunganya ahantu hagenzuwe nikirere, harimo gukama neza, gukama wafer, gukiza imiti igapakira igice, hamwe no gusaza ibikoresho bya elegitoroniki nibikoresho.

● Icyumba 1 cyangwa ubwoko 2 bwicyumba (kugenzura buri cyumba)
● Icyiza. 260 ℃
2 O2 kwibanda munsi ya 50ppm

Birakwiriye gukiza waferi ya semiconductor (PI ifotora PI, PBO, BCB ikiza), guteka ibirahuri, no gutondeka neza, hamwe nibindi.

Amatanura asukuye akoreshwa cyane mugutunganya ubushyuhe cyangwa kumisha waferi ya semiconductor, kristu yamazi, disiki nibindi bikoresho nibikoresho bisaba ikirere cyiza.

• ● Icyiciro cya 100
• ● 350L ubushobozi bunini
• ● Icyiza. ubushyuhe 260 ℃

• Kwumisha Vacuum kugirango ukureho ubuhehere hamwe nigishishwa mubikoresho bya electrode.
• ● Icyiza. ubushyuhe 300 ℃ / 400 ℃ birashoboka
• Gukoresha vacuum intera 101kPa -1Pa ● Iraboneka mubunini 3, ubushobozi bunini

Ifuru nini yo kumisha vacuum yagenewe ubwoko bwose bwo gukama vacuum.

• ● Icyiza. ubushyuhe 250 ℃
• Gukoresha intera ya vacuum 101kPa -0.1kPa

Iri ziko ninziza yo gukuramo amazi asigaye, umusemburo cyangwa ibindi bintu bihindagurika mubicuruzwa byangiza ubushyuhe. Pompo ya Vacuum izashyirwa hepfo yitanura kugirango ubike umwanya wo kwishyiriraho hamwe nu muyoboro wihuse wa flange. Ubu bwoko bw'itanura bukoreshwa cyane muri laboratoire, semiconductor, MEMS, hamwe na elegitoroniki.

Ibyumba 9 bigenzurwa byigenga kandi bigabana igice kimwe cya sisitemu ya vacuum. Irakwiriye ubwoko bwose bwibikoresho byicyuma, anaerobicanaerobic, ibikoresho fatizo byimiti, ibyuma byagaciro, ifu yicyuma nibindi bikomeye, ifu, paste, amazi, ibicuruzwa bya elegitoroniki

• ● 9-Ibyumba bigenzura
• Kubika ibicuruzwa by'agateganyo mugihe cyo gukora ibikoresho bya elegitoronike, ibikoresho bya optoelectronic, chipic semiconductor nibindi bikoresho kugirango wirinde okiside
• ● Min.50 kugeza 5 * 10-5Pa vacuum
• An Barcode scaneri kubika amakuru yibicuruzwa

Amashyiga ya GMS atagira ibyuma byakira ibikoresho bitandukanye byo gutunganya ubushyuhe bugera kuri 200 ℃. Amatanura yinganda arakwiriye cyane gushyushya ingoma, gusaza, gukomera kwinshi, gukama, gushyushya, gukiza, no gupima ibice.

• Material Ibikoresho byuma bidafite umwanda kugirango bikore amahugurwa meza cyangwa ibidukikije byangirika
• ● Icyiza. Ubushuhe. 200 ° C.
• Type Ubwoko bwa convection

• Birakwiriye kuvura ubushyuhe bwibicuruzwa
• ● Shyira kumurongo, ifuru ya convoyeur yazamuye umusaruro cyane
• Control Igenzura ryuzuye
• Speed ​​Umuvuduko wa convoyeur urashobora guhinduka kandi urashobora kubona uburyo bwinshi bwo kuvura
• ● Bifite ibikoresho bihindura inshuro, itara ryigiti, silinderi, nibindi ..
• Load Sisitemu yo kwikorera no gupakurura sisitemu yo guhuza ibikoresho byo hejuru no hasi

Ibyumba 9 bigenzurwa byigenga kandi bigabana igice kimwe cya sisitemu ya vacuum. Irakwiriye ubwoko bwose bwibikoresho byicyuma, anaerobicanaerobic, ibikoresho fatizo byimiti, ibyuma byagaciro, ifu yicyuma nibindi bikomeye, ifu, paste, amazi, ibicuruzwa bya elegitoroniki

• ● 9-Ibyumba bigenzura
• Kubika ibicuruzwa by'agateganyo mugihe cyo gukora ibikoresho bya elegitoronike, ibikoresho bya optoelectronic, chipic semiconductor nibindi bikoresho kugirango wirinde okiside
• ● Min.50 kugeza 5 * 10-5Pa vacuum
• An Barcode scaneri kubika amakuru yibicuruzwa

Bikwiranye na semiconductor ipakira porogaramu igice cyangwa kugerageza muri laboratoire, kugirango ikire.

Ifuru ya chambre nyinshi ikoresha sisitemu yo hejuru ya horizontal ya sisitemu yo kuzenguruka ikirere igabanya ubushyuhe hamwe nubushobozi.

• Kuboneka kuri 2/3/4/6 guhuza urugereko (kugenzura kwihagararaho kuri buri cyumba)
• Kubika umwanya wo kwishyiriraho
• Con Guhuza ibice

GZ-RTP-SM-12 ni kimwe cya kabiri cyikora cyihuta cyihuta cyo gutunganya amashyuza akoreshwa mu gushyushya wafer imwe ya 4-12
Icyiza. Ubushuhe. 1250 ℃
Icyiza. Imirongo 4 ya gaze

• Birakwiriye kuvura ubushyuhe bwibicuruzwa
• ● Shyira kumurongo, ifuru ya convoyeur yazamuye umusaruro cyane
• Control Igenzura ryuzuye
• Speed ​​Umuvuduko wa convoyeur urashobora guhinduka kandi urashobora kubona uburyo bwinshi bwo kuvura
• ● Bifite ibikoresho bihindura inshuro, itara ryigiti, silinderi, nibindi ..
• Load Sisitemu yo kwikorera no gupakurura sisitemu yo guhuza ibikoresho byo hejuru no hasi

Ibikoresho bigizwe ahanini nicyumba cya vacuum hamwe numuyoboro mwinshi wa plasma itanga amashanyarazi, sisitemu ya vacuum, sisitemu yo guta agaciro, sisitemu yo kugenzura byikora nibindi bice. Ihame shingiro ryimirimo iri mumwanya wa vacuum, gukoresha pompe vacuum kugirango ucyure studio kugirango ugere ku cyuho cya 0.15-0.3 mbar, hanyuma mubikorwa bya generator yumurongo mwinshi, gaze izaba ion, gushiraho ya plasma (leta ya kane yibintu), hanyuma ikoreshwa rya plasma hejuru yubuvuzi bwakazi.

• Machine Imashini itanga plasma
• ● Irashobora gukoreshwa buri gihe mubidukikije kugirango isukure kandi ikore ubuso bwibice bidasanzwe
• Icyumba cya Vacuum

GZ yihuta yubushyuhe buke bwinama yinama y'abaminisitiri yemeje module nshya yazamuwe. Irashobora kugera ku butumburuke buri munsi ya 5% RH. Igicuruzwa kiroroshye gukora. Birasabwa cyane cyane muburyo bwose bwa elegitoroniki, kamera, kamera, ibikoresho rusange bya laboratoire, microscopes, ibikoresho na chimique, nibindi kugirango birinde ibibyimba nindwara.

Akabati yumye ya ESD nigikoresho cyingenzi mubidukikije byose aho ibikoresho bya elegitoroniki byoroshye bikoreshwa, bikaramba kuramba no gukora kubirinda ingaruka zishobora kwangiza amashanyarazi. Imbere y’inama y’abaminisitiri ikunze kuba irimo ibikoresho bitekanye bya ESD, nka anti-static ifuro cyangwa bombo ya pulasitike ikora, kugira ngo hirindwe ubundi buryo bwo kubika ibintu bibitswe.

Akabati ka azote irashobora gufasha kurwanya umwanda uva mu mukungugu, uduce, n’indi myanda ishobora kugira ingaruka ku mikorere no kwizerwa bya semicon na electronics. Ibidukikije bya azote bisukuye bigumana isuku yibigize hamwe nubuso mugihe cyo gukora. Mugihe cyicyiciro cya 100 (ISO 5) ibidukikije bisukuye, indorerwamo yuzuye ibyuma bitagira ibyuma byumye bikoreshwa mukubika ibice nibikoresho neza.

Akabati ka azote idafite ingese ni igisubizo cyihariye cyo kubika cyagenewe kurinda ibice byoroshye n’ibikoresho byangiza okiside n’ubushuhe bwo kubungabunga ikirere cya azote. Akabati k'ibyuma bikozwe mu cyuma gikozwe mu rwego rwo hejuru 304 ibyuma bitagira umuyonga, bitanga imbaraga zo kurwanya ruswa kandi byoroshye kuyisukura. Kurangiza indorerwamo ntabwo itanga isura igezweho gusa ahubwo inorohereza isuku no kuyitaho. Ubuso burebure burangiye kandi byoroshye-gusukura imiterere yaya mabati bituma abera ahantu hasukuye, hamwe na moderi zimwe na zimwe zujuje ubuziranenge bwicyiciro cya 100

Inama ya azote ya kaburimbo ikoreshwa cyane muri semiconductor, Photonics ninganda za FPD, kubika ibikoresho bidasanzwe hamwe n’ikoranabuhanga rya elegitoronike mu rwego rwo gukumira okiside, kwibasira imibiri y’amahanga no kurwanya ubushuhe mu bidukikije.

Inama y'Abaminisitiri yagenewe umutwaro ntarengwa kandi uramba, Minisitiri w’icyuma azote ushyizwemo icyuma cya azote kugira ngo usukure aho ukorera, kugira ngo urinde ibintu bibikwa kugira okiside, kabili yose N2 yumye ikorwa na SUS # 304.

Mugukomeza ubushyuhe buke, akabati ka azote ifasha kugabanya ububobere buke mugihe cyo kubika no gutunganya ibice bya IC. Irashobora guteza imbere abagurisha ubuziranenge mugabanya okiside no kwemeza amasano meza, yizewe. Ibi nibyingenzi mukurinda ruswa, gusiba, cyangwa izindi nenge ziterwa nubushuhe bushobora kugira ingaruka kumyizerere yububiko bwa IC.

• Ange Urwego rw'ubushuhe: 1-60% RH
• Ubushobozi: 500/1020/1250/1510Liter
• ESD Umutekano