Ultra-yakakwirira tembiricha inert gasi ovheni yakakosha midziyo mumaindasitiri uko yakakwirira-tembiricha kugadzirisa munzvimbo inert inodiwa, kuve nechokwadi chemhando uye kuvimbika kwezvinhu zviri kugadziriswa. Inoshanda kumhepo mumhepo inert magasi akadai seArgon, Carbon Dioxide, Helium, uye Nitrogen. Iyo yakavhurika-mhepo inorema-gauge nichrome waya hita zvinhu inopa yakasimba kupisa sosi kusvika ku600 madhigirii. Iyo yakasarudzika mbiri-makoko dhizaini inobvumira kutenderera kwemhepo inotonhorera uye ambient kutenderedza kamuri yemukati yakazadzwa neinert gasi, kuchengetedza yakagadzikana yemukati kudzvanywa uye tembiricha.

Inert gasi oveni dzakanakira maovheni ekumaindasitiri zvinosanganisira kugadzirisa zvinhu munzvimbo inodzorwa yemhepo, kusanganisira kuomeswa kwehunyoro, wafer kuomeswa, resin kurapa semiconductor kurongedza, uye kuchembera kwezvinhu zvemagetsi nemidziyo.

● 1 chamber kana 2 chamber mhando (standalone control yekamuri yega yega)
● Max. 260 ℃
● O2 concentration pasi pe50ppm

Inokodzera kurapa semiconductor wafers (photoresist PI, PBO, BCB kurapa), girazi substrate kubheka, uye yakakwirira-chaiyo annealing kurapwa, nezvimwe.

Ovheni dzakachena dzinoshandiswa zvakanyanya mukupisa kupisa kana kuomeswa kwema semiconductor wafers, liquid crystals, disks uye zvimwe zvikamu uye zvishandiso zvinoda yakachena mamiriro emhepo.

• ● Kirasi yechi100
• ● 350L yakakura simba
• ● Max. tembiricha 260 ℃

• ● Vacuum kuomesa kubvisa mwando uye solvent mu electrode zvinhu.
• ● Max. tembiricha 300 ℃/400 ℃ inosarudzwa
• ● Operating vacuum range 101kPa -1Pa ● Inowanikwa muhukuru 3, yakakura.

Yakakura vacuum yekuomesa oven yakagadzirirwa marudzi ese evacuum yekuomesa chinangwa.

• ● Max. tembiricha 250 ℃
• ● Kushanda vacuum range 101kPa -0.1kPa

Ovheni iyi yakanakira kubvisa yasara mvura, zvinonyungudutsa kana zvimwe zvinopisa kubva muzvigadzirwa zvinonzwa tembiricha. Vacuum pombi ichaiswa pazasi pehovhoni kuchengetedza nzvimbo yekuisa nekukurumidza yekubatanidza flange pombi. Iyi mhando yeovheni inoshandiswa zvakanyanya mumalabhu, semiconductor, MEMS, uye nzvimbo yemagetsi.

Iwo makamuri e9 anodzorwa akazvimirira uye anogovera imwe seti yevacuum system. Inokodzera marudzi ese emhando dzesimbi, anaerobicanaerobic, kemikari mbishi zvinhu, simbi dzinokosha, simbi poda uye zvimwe zvakasimba, upfu, namira, mvura, zvigadzirwa zvemagetsi.

• ● 9-Chambers standalone control
• ● Chengetedza zvigadzirwa kwenguva pfupi panguva yekugadzira zvigadzirwa zvemagetsi, optoelectronic zvishandiso, semiconductor machipisi uye zvimwe zvigadzirwa kudzivirira oxidation.
• ● Min.50 kusvika 5 * 10-5Pa vacuum
• ● Barcode scanner yekuchengetedza ruzivo rwechigadzirwa

GMS simbi isina simbi maovheni maindasitiri anogashira akasiyana siyana emafuta ekugadzirisa maapplication anosvika 200 ℃. Maovheni eindasitiri anonyatsokodzera kupisa kwedhiramu, kuchembera, kuomesa musoro, kuomesa, preheating, kurapa, uye chikamu chekuyedza.

• ● Simbi isina simbi inokwana shopu yakachena kana nharaunda inoora
• ● Max. Temp. 200°C
• ● Kumanikidzwa convection mhando

• ● Inokodzera kurapa kwekupisa kwezvigadzirwa
• ● Set pamutsetse wekugadzira, ovheni yekutakura yakavandudza kugadzirwa kwakanaka kwazvo
• ● Kudzora zvakakwana otomatiki
• ● The conveyor kumhanya inochinjika uye kukwanisa se multiple kurapwa maitiro
• ● Yakashongedzerwa nefrequency converter, stake light, cylinder, nezvimwewo.
• ● Automatic load uye unload system yekubatanidza nepamusoro uye pasi pemvura

Iwo makamuri e9 anodzorwa akazvimirira uye anogovera imwe seti yevacuum system. Inokodzera marudzi ese emhando dzesimbi, anaerobicanaerobic, kemikari mbishi zvinhu, simbi dzinokosha, simbi poda uye zvimwe zvakasimba, upfu, namira, mvura, zvigadzirwa zvemagetsi.

• ● 9-Chambers standalone control
• ● Chengetedza zvigadzirwa kwenguva pfupi panguva yekugadzira zvigadzirwa zvemagetsi, optoelectronic zvishandiso, semiconductor machipisi uye zvimwe zvigadzirwa kudzivirira oxidation.
• ● Min.50 kusvika 5 * 10-5Pa vacuum
• ● Barcode scanner yekuchengetedza ruzivo rwechigadzirwa

Inokodzera semiconductor kurongedza chirongwa chikamu kana kuyedzwa mulabhu, yekurapa resin.

Multi-chamber oven inoshandisa yakakwira-vhoriyamu yakatwasuka air recirculation system iyo inowedzera tembiricha kufanana uye kuita.

• ● Inowanikwa 2/3/4/6 chamber musanganiswa (standalone control yekamuri yega yega)
• ● Kuchengetedza nzvimbo yekuisa
• ● Horizontal convection

GZ-RTP-SM-12 is a semi-otomatiki vertical nekukurumidza thermal processing system yakaisirwa kupisa imwe chete 4-12 inch wafer.
Max. Temp. 1250 ℃
Max. 4 gasi mitsetse

• ● Inokodzera kurapa kwekupisa kwezvigadzirwa
• ● Set pamutsetse wekugadzira, ovheni yekutakurisa yakavandudza kugadzirwa kwakanyanya
• ● Kudzora zvakakwana otomatiki
• ● The conveyor kumhanya inochinjika uye kukwanisa se multiple kurapwa maitiro
• ● Yakashongedzerwa nefrequency converter, stake light, cylinder, nezvimwewo.
• ● Automatic load uye unload system yekubatanidza nepamusoro uye pasi pemvura

Midziyo yacho inonyanya kuumbwa yevacuum chamber uye yakakwira frequency plasma magetsi, vacuum system, inflation system, otomatiki control system uye zvimwe zvikamu. Nheyo yekutanga yebasa iri muvacuum state, kushandiswa kwevacuum pombi kupukuta studio kuti iwane vacuum ye 0.15-0.3 mbar, uyezve mune chinzvimbo chepamusoro-frequency jenareta, gasi richave ionized, kuumbwa. yeplasma (yechina mamiriro ezvinhu), uyezve kushandiswa kweplasma pamusoro peiyo workpiece kurapwa.

• ● Plasma system-handing machine
• ● Inogona kushandiswa nguva dzose munzvimbo yekugadzira kuchenesa uye kushandura pamusoro pezvikamu zvisinganzwisisike.
• ● Vacuum imba

GZ inokurumidza kuderera humidity hunyoro humbowo kabati inotora iyo nyowani yakakwidziridzwa dehumidification module. Inogona kusvika pakunyorova pasi pe5% RH. Chigadzirwa chacho chiri nyore kushanda. Inonyanya kukurudzirwa kune ese marudzi emagetsi ezvikamu, makamera, makamera, general laboratory zviridzwa, microscopes, zvinhu uye makemikari, etc.kudzivirira mold uye mildew.

ESD makabati akaomeswa chishandiso chakakosha munzvimbo chero ipi neipi inobatika zvinhu zvemagetsi zvinobatika, kuve nechokwadi chekugara kwavo kwenguva refu uye kuita nekuvadzivirira kubva kune zvinogona kukuvadza zvinokonzeresa magetsi akamira. Iyo yemukati yekabati inowanzo miswa neESD-yakachengeteka zvinhu, senge anti-static foam kana conductive epurasitiki mabhini, kupa imwe dziviriro yezvinhu zvakachengetwa.

Nitrogen makabati anogona kubatsira kudzora kusvibiswa kubva kuguruva, zvimedu, uye kumwe kusvibiswa kunogona kukanganisa kuita uye kuvimbika kwesemicon uye kugadzirwa kwemagetsi. Iyo yakachena nitrogen nharaunda inochengetedza kuchena kwezvikamu uye nzvimbo panguva yekugadzira maitiro. Kune zviitiko mukirasi 100 (ISO 5) nharaunda yehutsanana, yakazara girazi resimbi isina simbi yakaoma kabati rinoshandiswa kuchengetedza chaiwo zvikamu uye zviridzwa.

A Stainless simbi nitrogen kabati ndiyo yakasarudzika yekuchengetera mhinduro yakagadzirirwa kuchengetedza zvinhu zvine hunyoro uye zvinhu kubva kune oxidation uye hunyoro kukuvara nekuchengetedza inert nitrogen mamiriro. Stainless simbi makabati anogadzirwa kubva-yemhando yepamusoro 304 simbi isina tsvina, iyo inopa yakanakisa corrosion resistance uye iri nyore kuchenesa. Iyo yakamisikidzwa kupedzisa haingopi chete kutaridzika kwemazuva ano asiwo inobatsira kuchenesa nekugadzirisa. Iyo yepamusoro yepamusoro kupedzisa uye nyore-kuchenesa chimiro cheaya makabati anoita kuti ave akakodzera nzvimbo dzakachena, aine mamwe mamodheru anotosangana nehutsanana mwero weKirasi 100.

Stainless simbi nitrogen kabati inowanzoshandiswa mu semiconductor, photonics uye FPD maindasitiri, yakakosha zvinhu zvekuchengetedza uye zvikamu zvemagetsi kudzivirira oxidation, kurwiswa kwemitumbi yekunze uye humidity control munzvimbo yakachena.

Iyo cabinet yakagadzirirwa kuremerwa uye kusimba, Stainless simbi nitrogen cabinet inoiswa ine nitrogen inlet yekuchenesa nzvimbo yekushanda, kuitira kuchengetedza zvinhu zvekuchengetera kubva pakuiswa oxidized, iyo N2 yakaoma kabati inogadzirwa neSUS#304.

Nekuchengetedza yakaderera humidity mazinga, nitrogen makabati anobatsira kuderedza kuratidzwa kwehunyoro panguva yekuchengetedza uye kugadzirisa kweIC zvikamu. Inogona kuvandudza solder joint quality nekuderedza oxidation uye nekuona yakachena, yakavimbika kubatana. Izvi zvakakosha pakudzivirira corrosion, delamination, kana humwe hurema hune hukama hunogona kukanganisa kuvimbika kweIC mapakeji.

• ● Humidity Range: 1-60%RH
• ● Kukwanisa: 500/1020/1250/1510Liter
• ● ESD Safe