I-ovens yegesi ye-inert ene-ultra-high-high-high-high-high-high-high-high-high-high-high-high-high-high-high-high-high-high-high-high-high-high-temperature inert yegesi zixhobo ezibalulekileyo kumashishini apho ukulungiswa kokushisa okuphezulu kwi-atmosphere ye-inert kuyadingeka, ukuqinisekisa umgangatho kunye nokunyaniseka kwezinto ezicutshungulwayo. Isebenza kwiatmosfera kwiigesi ezingasebenziyo ezifana neArgon, iCarbon Dioxide, iHelium, neNitrogen. Izinto ezivulekileyo ze-heavy-gauge ze-nichrome heater zibonelela ngomthombo wobushushu obuqinileyo ukuya kuthi ga kwi-600 degrees. Uyilo olukhethekileyo lweqokobhe ezimbini luvumela ukujikeleza komoya opholileyo kunye nomoya ojikeleze kwigumbi elingaphakathi elizaliswe yigesi engasebenziyo, ukugcina uxinzelelo lwangaphakathi oluzinzileyo kunye nobushushu.

Ii-oveni zerhasi engasebenziyo zilungele usetyenziso lwe-oveni yemizi-mveliso ebandakanya ukusetyenzwa kwemathiriyeli kwindawo elawulwayo, kubandakanya ukomisa ukufuma, ukomiswa kwe-wafer, ukunyanga iresin yokupakishwa kwe-semiconductor, kunye nokuguga kwezinto zombane kunye nezixhobo.

● Igumbi eli-1 okanye iintlobo ezi-2 zegumbi (ulawulo oluzimeleyo lwegumbi ngalinye)
● Max. 260℃
● Ugxininiso lwe-O2 ngaphantsi kwe-50ppm

Ilungele ukunyanga ii-wafers ze-semiconductor (i-photoresist PI, i-PBO, i-BCB yokunyanga), i-glass substrate yokubhaka, kunye nonyango oluchanekileyo lwe-annealing, njl.

Ii-ovens ezicocekileyo zisetyenziswa kakhulu kunyango lokushisa okanye ukomiswa kwee-wafers ze-semiconductor, iikristale zamanzi, iidiski kunye nezinye izinto kunye nezixhobo ezifuna iimeko zomoya ococekileyo.

• ● Iklasi ye-100
• ● 350L umthamo omkhulu
• ● Max. iqondo lobushushu 260℃

• ● Ukomisa i-vacuum ukususa ukufuma kunye ne-solvent kwizinto ze-electrode.
• ● Max. iqondo lobushushu 300℃/400℃ uyazikhethela
• ● Uluhlu lwevacuum esebenzayo 101kPa -1Pa ● Ifumaneka ngeesayizi ezi-3, umthamo omkhulu

I-oven enkulu yokucoca i-vacuum eyenzelwe zonke iintlobo zenjongo yokomisa i-vacuum.

• ● Max. iqondo lobushushu 250℃
• ● Uluhlu lwevacuum esebenzayo 101kPa -0.1kPa

Le oveni ilungele ukususa amanzi ashiyekileyo, izinyibilikisi okanye ezinye iikhompawundi eziguquguqukayo kwiimveliso ezingevayo kubushushu. Impompo yokufunxa iya kufakwa kwindawo esezantsi ye-oveni ukugcina indawo yofakelo kunye nemibhobho yoqhagamshelo olukhawulezayo lweflange. Olu hlobo lwe-oven lusetyenziswa ngokubanzi kwiilebhu, i-semiconductor, i-MEMS, kunye nommandla we-elektroniki.

Amagumbi ayi-9 alawulwa ngokuzimeleyo kwaye abelana ngeseti enye ye-vacuum system. Ilungele zonke iintlobo zemathiriyeli yesinyithi, i-anaerobicanaerobic, izixhobo zekhemikhali ekrwada, iintsimbi ezixabisekileyo, umgubo wesinyithi kunye nezinye izinto eziqinileyo, umgubo, intlama, ulwelo, iimveliso zombane.

• ● Ulawulo lwe-9-Chambers standalone
• ● Gcina iimveliso okwexeshana ngexesha lenkqubo yokuvelisa izixhobo zombane, izixhobo ze-optoelectronic, iitshiphusi zesemiconductor kunye nezinye izixhobo ukunqanda i-oxidation.
• ● Min.50 ukuya ku-5 * 10-5Pa ivacuum
• ● Iskena sebhakhowudi ukugcina ulwazi lwemveliso

Ii-oveni ze-GMS zensimbi engenastainless zithatha iindlela ezahlukeneyo zokusetyenzwa kwe-thermal ukuya kuthi ga kwi-200 ℃. Ii-oveni zemizi-mveliso zikulungele ngokufanelekileyo ukufudumeza igubu, ukuguga, ukuqina, ukomisa, ukufudumeza kwangaphambili, ukunyanga, kunye novavanyo lwamacandelo.

• ● Imathiriyeli yentsimbi engatyiwayo ukuze ihambelane nendawo yokusebenzela ecocekileyo okanye indawo enomhlwa
• ● Max. Temp. 200°C
• ● Uhlobo olunyanzelweyo lokuhambisa

• ● Ukulungele unyango lwe-thermal yeemveliso
• ● Ukubeka kumgca wemveliso, i-oven yokuhambisa iphucule ukusebenza kakuhle kwemveliso
• ● Ulawulo oluzenzekelayo ngokupheleleyo
• ● Isantya sokuhambisa siyahlengahlengiswa kwaye siyakwazi ukubona inkqubo yonyango emininzi
• ● Ixhotyiswe nge-frequency converter, isiteki sokukhanya, isilinda, njl.
• ● Ukulayisha okuzenzekelayo kunye nenkqubo yokukhulula ukudibanisa kunye nezixhobo eziphezulu kunye nezantsi

Amagumbi ayi-9 alawulwa ngokuzimeleyo kwaye abelana ngeseti enye ye-vacuum system. Ilungele zonke iintlobo zemathiriyeli yesinyithi, i-anaerobicanaerobic, izixhobo zekhemikhali ekrwada, iintsimbi ezixabisekileyo, umgubo wesinyithi kunye nezinye izinto eziqinileyo, umgubo, intlama, ulwelo, iimveliso zombane.

• ● Ulawulo lwe-9-Chambers standalone
• ● Gcina iimveliso okwexeshana ngexesha lenkqubo yokuvelisa izixhobo zombane, izixhobo ze-optoelectronic, iitshiphusi zesemiconductor kunye nezinye izixhobo ukunqanda i-oxidation.
• ● Min.50 ukuya ku-5 * 10-5Pa ivacuum
• ● Iskena sebhakhowudi ukugcina ulwazi lwemveliso

Ifanele icandelo leprogram yokupakishwa kwe-semiconductor okanye uvavanyo kwilebhu, ukunyanga i-resin.

I-oven enamagumbi amaninzi isebenzisa inkqubo yokuhambisa umoya ethe tyaba ephezulu eyenyusa ukufana kobushushu kunye nokusebenza.

• ● Ifumaneka kwi-2/3/4/6 indibaniselwano yegumbi (ulawulo oluzimeleyo lwegumbi ngalinye)
• ● Ukugcina isithuba sofakelo
• ● Ukuhambisa okuthe tye

I-GZ-RTP-SM-12 yinkqubo ye-semi-automatic nkqo ekhawulezayo yokusetyenzwa kwe-thermal esetyenziselwa ukufudumeza enye i-4-12 intshi yewafer.
Max. Temp. 1250℃
Max. 4 imigca yegesi

• ● Ukulungele unyango lwe-thermal yeemveliso
• ● Ukubeka kumgca wemveliso, i-oven yokuhambisa iphucule ukusebenza kakuhle kwemveliso
• ● Ulawulo oluzenzekelayo ngokupheleleyo
• ● Isantya sokuhambisa siyahlengahlengiswa kwaye siyakwazi ukubona inkqubo yonyango emininzi
• ● Ixhotyiswe nge-frequency converter, isiteki sokukhanya, isilinda, njl.
• ● Ukulayisha okuzenzekelayo kunye nenkqubo yokukhulula ukudibanisa kunye nezixhobo eziphezulu kunye nezantsi

Izixhobo ikakhulu zenziwe ngegumbi lokucoca kunye nonikezelo lwamandla aphezulu eplasma, inkqubo yevacuum, inkqubo yokunyuka kwamaxabiso, inkqubo yolawulo oluzenzekelayo kunye nezinye iindawo. Umgaqo osisiseko womsebenzi kwi-vacuum state, ukusetyenziswa kweempompo zokucoca ukucoca i-studio ukufezekisa i-vacuum ye-0.15-0.3 mbar, kwaye emva koko kwindima ye-generator ye-high-frequency generator, igesi iya kuba yi-ionized, ukubunjwa. yeplasma (imeko yesine yomcimbi), kunye nokusetyenziswa kweplasma kumphezulu wonyango lomsebenzi.

• ● Umatshini wokunikezela ngePlasma
• ● Ingasetyenziswa rhoqo kwindawo yokwenziwa kwemveliso ukucoca nokwenza umphezulu wamalungu amile ngendlela engaqhelekanga.
• ● Igumbi lokufunxa

Ikhabhathi yobungqina bokufuma kwe-GZ ekhawulezayo ephantsi yamkele imodyuli entsha ephuculweyo yokuphelisa ukufuma. Inokufikelela kubumanzi obungaphantsi kwe-5% RH. Imveliso kulula ukuyisebenzisa. Kunconywa ngokukodwa kuzo zonke iintlobo zezixhobo ze-elektroniki, iikhamera, iikhamera, izixhobo zebhubhoratri jikelele, i-microscopes, izinto kunye neekhemikhali, njl.

Iikhabhathi ezomileyo ze-ESD zisisixhobo esibalulekileyo nakweyiphi na imeko apho izixhobo ze-elektroniki ziphathwayo, ziqinisekisa ubomi obude kunye nokusebenza kwazo ngokuzikhusela kwiziphumo ezinokuba yingozi zombane ongashukumiyo. Ingaphakathi lekhabhinethi lihlala lifakwe izinto ezikhuselekileyo ze-ESD, ezifana ne-anti-static foam okanye imigqomo yeplastiki eqhubayo, ukunika ukhuseleko olongezelelweyo kwizinto ezigciniweyo.

Iikhabhinethi ze-nitrogen zinokunceda ukulawula ukungcoliswa kothuli, amaqhekeza, kunye nezinye izinto ezingcolileyo ezinokuchaphazela ukusebenza kunye nokuthembeka kwe-semicon kunye nemveliso ye-elektroniki. Indawo ecocekileyo yenitrogen igcina ubunyulu bamacandelo kunye nomphezulu ngexesha leenkqubo zokuvelisa. Ngezihlandlo kwiklasi ye-100 (ISO 5) yokucoceka kwendalo, isipili esipheleleyo sensimbi engenasici kwikhabhinethi eyomileyo isetyenziselwa ukugcina amacandelo kunye nezixhobo ezichanekileyo.

Ikhabhinethi ye-nitrogen yensimbi engenasici sisisombululo esikhethekileyo sokugcina esenzelwe ukukhusela amacandelo abuthathaka kunye nezinto ezivela kwi-oxidation kunye nomonakalo womswakama ngokugcina umoya we-nitrogen ongenayo. Iikhabhinethi zetsimbi zetsimbi zenziwe kwikhwalithi ephezulu ye-304 yensimbi engenasici, enika ukuxhathisa okugqwesileyo kwe-corrosion kwaye kulula ukuyicoca. Ukugqitywa kwesibuko akunikezeli nje ukubonakala kwanamhlanje kodwa kuququzelela ukucoca kunye nokugcinwa. Ukugqitywa komphezulu ophezulu kunye nokulula ukucoceka kwezi khabhinethi kubenza ukuba bafanelekele iindawo ezicocekileyo zegumbi, kunye neemodeli ezithile zidibana nomgangatho wococeko lweKlasi ye-100.

Ikhabhinethi ye-nitrogen yensimbi engenasici isetyenziswa ngokuqhelekileyo kwi-semiconductor, i-photonics kunye namashishini e-FPD, ukugcinwa kwezinto ezikhethekileyo kunye namacandelo e-elektroniki ukukhusela i-oxidation, ukuhlaselwa kwemizimba yangaphandle kunye nokulawulwa komswakama kwindawo ecocekileyo.

Ikhabhinethi yenzelwe umthwalo ophezulu kunye nokuqina, i-Stainless steel nitrogen cabinet ifakwe kunye ne-nitrogen inlet yokucoca indawo yokusebenza, ukuze kukhuselwe izinto zokugcina izinto ezivela kwi-oxidized, yonke i-N2 yekhabhinethi eyomileyo yenziwe ngu-SUS #304.

Ngokugcina amanqanaba okufuma aphantsi, iikhabhinethi zenitrogen zinceda ukunciphisa ukubonakaliswa komswakama ngexesha lokugcinwa kunye nokulungiswa kwamacandelo e-IC. Inokuphucula umgangatho odibeneyo we-solder ngokunciphisa i-oxidation kunye nokuqinisekisa ukudibanisa okucocekileyo, okuthembekileyo. Oku kubalulekile ekuthinteleni ukubola, i-delamination, okanye ezinye iziphene ezinxulumene nokufuma ezinokuchaphazela ukuthembeka kweepakethe ze-IC.

• ● Uluhlu lokufuma: 1-60%RH
• ● Umthamo: 500/1020/1250/1510Liter
• ● ESD Safe