Amahhavini wegesi angenayo izinga lokushisa eliphezulu kakhulu ayizinto ezibalulekile ezimbonini lapho kudingeka khona ukucubungula izinga lokushisa eliphezulu endaweni engasebenzi, okuqinisekisa ikhwalithi nobuqotho bezinto ezicutshungulwayo. Isebenza emkhathini kumagesi angenayo njenge-Argon, i-Carbon Dioxide, i-Helium, ne-Nitrogen. Ama-elementi weheater ye-nichrome ye-heavy gauge evulekile yomoya enikeza umthombo wokushisa oqinile ongafika kuma-degree angu-600. Idizayini eyingqayizivele yamagobolondo amabili ivumela ukujikeleza komoya opholile kanye nendawo ezungezile egunjini elingaphakathi eligcwele igesi engasebenzi, okugcina ukucindezela kwangaphakathi okuzinzile nezinga lokushisa.

Amahhavini egesi angenayo alungele ukusetshenziswa kukahhavini wezimboni ofaka izinto zokucubungula endaweni elawulwayo, okuhlanganisa ukomisa umswakama, ukomiswa kwe-wafer, ukuphulukiswa kwe-resin yokupakishwa kwe-semiconductor, nokuguga kwezingxenye ze-elekthronikhi namadivayisi.

● Igumbi eli-1 noma izinhlobo zegumbi ezi-2 (ukulawula okuzimele kwegumbi ngalinye)
● Ubukhulu. 260℃
● Ukugxila kwe-O2 ngaphansi kuka-50ppm

Ifanele ukuphulukisa amawafa e-semiconductor (photoresist PI, PBO, BCB curing), ukubhaka kwengilazi substrate, kanye nokwelashwa okunemba okuphezulu kwe-annealing, njll.

Amahhavini ahlanzekile asetshenziswa kakhulu ekwelapheni ukushisa noma ukomiswa kwama-wafers e-semiconductor, amakristalu awuketshezi, amadiski kanye nezinye izakhi namadivayisi adinga izimo zomoya ezihlanzekile.

• ● Ikilasi le-100
• ● 350L umthamo omkhulu
• ● Ubukhulu. izinga lokushisa 260 ℃

• ● Vacuum drying ukuze kukhishwe umswakamo kanye ne-solvent ezintweni ze-electrode.
• ● Ubukhulu. izinga lokushisa elingu-300℃/400℃ liyakhethwa
• ● Ibanga le-vacuum elisebenzayo 101kPa -1Pa● Itholakala ngosayizi abangu-3, ​​umthamo omkhulu

Ihhavini enkulu yokumisa i-vacuum eyenzelwe zonke izinhlobo zenhloso yokumisa i-vacuum.

• ● Ubukhulu. lokushisa 250 ℃
• ● Ibanga le-vacuum elisebenzayo 101kPa -0.1kPa

Le ovini ilungele ukususa amanzi asele, izincibilikisi noma ezinye izinhlanganisela eziguquguqukayo emikhiqizweni engezwani namazinga okushisa. Iphampu yevacuum izofakwa ngaphansi kwehhavini ukuze konge indawo yokufaka ngokuxhuma okusheshayo kwamapayipi e-flange. Lolu hlobo lukahhavini lusetshenziswa kakhulu kumalebhu, isemiconductor, i-MEMS, kanye nendawo kagesi.

Amakamelo angu-9 alawulwa ngokuzimela futhi abelana ngesethi eyodwa yesistimu ye-vacuum. Ilungele zonke izinhlobo zezinto zensimbi, i-anaerobicanaerobic, izinto zokusetshenziswa zamakhemikhali, izinsimbi eziyigugu, impushana yensimbi nokunye okuqinile, impuphu, unamathisele, uketshezi, imikhiqizo ye-elekthronikhi.

• ● Ukulawula okuzimele kwe-9-Chambers
• ● Gcina imikhiqizo okwesikhashana phakathi nenqubo yokukhiqiza yezinto zikagesi, izisetshenziswa ze-optoelectronic, ama-semiconductor chips namanye amadivaysi ukuze uvimbele i-oxidation.
• ● I-vacuum encane engu-50 ukuya ku-5*10-5Pa
• ● Iskena sebhakhodi ukugcina ulwazi lomkhiqizo

Amahhavini wezimboni zensimbi engagqwali we-GMS athatha izinhlobo ezahlukene zokucubungula okushisayo kufika ku-200 ℃. Ohhavini bezimboni bafaneleka kahle ukushisisa izigubhu, ukuguga, ukuqina komgogodla, ukomisa, ukushisa kuqala, ukuphulukisa, nokuhlola ingxenye.

• ● Insimbi engagqwali ukuze ihambisane neshabhu yokusebenzela ehlanzekile noma indawo egqwalile
• ● Ubukhulu. Temp. 200°C
• ● Uhlobo lwe-convection oluphoqelelwe

• ● Ifanele ukwelashwa okushisayo kwemikhiqizo
• ● Ibekwe emgqeni wokukhiqiza, ihhavini lokuthutha lithuthukise ukusebenza kahle kokukhiqiza kakhulu
• ● Ukulawula okuzenzakalelayo ngokugcwele
• ● Isivinini sokuthutha siyalungiseka futhi sikwazi ukubona inqubo yokwelapha eminingi
• ● Ifakwe i-frequency converter, isiteki ukukhanya, isilinda, njll..
• ● Isistimu yokulayisha nokulayisha ngokuzenzakalelayo ukuze ixhumeke nezinto zokusebenza ezikhuphuka nomfula

Amakamelo angu-9 alawulwa ngokuzimela futhi abelana ngesethi eyodwa yesistimu ye-vacuum. Ilungele zonke izinhlobo zezinto zensimbi, i-anaerobicanaerobic, izinto zokusetshenziswa zamakhemikhali, izinsimbi eziyigugu, impushana yensimbi nokunye okuqinile, impuphu, unamathisele, uketshezi, imikhiqizo ye-elekthronikhi.

• ● Ukulawula okuzimele kwe-9-Chambers
• ● Gcina imikhiqizo okwesikhashana phakathi nenqubo yokukhiqiza yezinto zikagesi, izisetshenziswa ze-optoelectronic, ama-semiconductor chips namanye amadivaysi ukuze uvimbele i-oxidation.
• ● I-vacuum encane engu-50 ukuya ku-5*10-5Pa
• ● Iskena sebhakhodi ukugcina ulwazi lomkhiqizo

Ifanele ingxenye yohlelo lokupakisha lwe-semiconductor noma ukuhlolwa elebhu, ukuphulukiswa kwe-resin.

Ihhavini enamagumbi amaningi isebenzisa isistimu yomoya ovundlile enevolumu ephezulu ekhulisa ukufana kwezinga lokushisa nokusebenza.

• ● Itholakalela inhlanganisela yegumbi elingu-2/3/4/6 (ukulawula okuzimele kwegumbi ngalinye)
• ● Ukulondoloza indawo yokufaka
• ● I-convection evundlile

I-GZ-RTP-SM-12 iyisistimu yokucubungula okushisayo esheshayo esetshenziswa ukushisisa eyodwa engu-4-12 inch.
Ubukhulu. Temp. 1250 ℃
Ubukhulu. 4 imigqa kagesi

• ● Ifanele ukwelashwa okushisayo kwemikhiqizo
• ● Ibekwe emgqeni wokukhiqiza, ihhavini lokuthutha lithuthukise ukusebenza kahle kokukhiqiza kakhulu
• ● Ukulawula okuzenzakalelayo ngokugcwele
• ● Isivinini sokuthutha siyalungiseka futhi sikwazi ukubona inqubo yokwelapha eminingi
• ● Ifakwe i-frequency converter, isiteki ukukhanya, isilinda, njll..
• ● Isistimu yokulayisha nokulayisha ngokuzenzakalelayo ukuze ixhumeke nezinto zokusebenza ezikhuphuka nomfula

Imishini ikakhulukazi yakhiwe i-vacuum chamber kanye ne-high frequency plasma power supply, i-vacuum system, i-inflation system, isistimu yokulawula okuzenzakalelayo nezinye izingxenye. Isimiso esiyisisekelo somsebenzi sisesimweni se-vacuum, ukusetshenziswa kwamaphampu e-vacuum ukuze kukhishwe i-studio ukuze kutholakale i-vacuum ye-0.15-0.3 mbar, bese endimeni ye-generator ephezulu-frequency, igesi izokwenziwa ionized, ukwakheka. kwe-plasma (isimo sesine sezinto), bese kuba ukusetshenziswa kwe-plasma ebusweni bokwelashwa kwe-workpiece.

• ● Umshini wokunikezela ngesistimu ye-Plasma
• ● Ingasetshenziswa ngokungaguquki endaweni yokukhiqiza ukuze kuhlanzeke futhi kusebenze izingxenye ezimise okwenqaba.
• ● Igumbi lokuhlanza

Ikhabethe le-GZ eliqinisekisa umswakama ophansi ngokushesha lamukela imojula entsha ethuthukisiwe yokususa umswakama. Ingafinyelela umswakama ongaphansi kuka-5% RH. Umkhiqizo kulula ukusebenza. Kunconywa ikakhulukazi kuzo zonke izinhlobo zezingxenye ze-elekthronikhi, amakhamera, amakhamera, amathuluzi ajwayelekile aselabhorethri, ama-microscopes, izinto zokwakha namakhemikhali, njll.ukuvimbela isikhunta nesikhutha.

Amakhabethe omile we-ESD ayithuluzi elibalulekile kunoma iyiphi indawo lapho kusingathwa khona izingxenye ze-elekthronikhi ezibucayi, eziqinisekisa ukuphila kwazo isikhathi eside nokusebenza kwazo ngokuzivikela emiphumeleni engase ibe yingozi kagesi omile. Ingaphakathi lekhabhinethi livamise ukulayishwa ngezinto eziphephile ze-ESD, njengegwebu eliphikisayo noma imigqomo yepulasitiki eqhubayo, ukuze kunikeze ukuvikeleka okwengeziwe kwezinto ezigciniwe.

Amakhabethe e-nitrogen angasiza ukulawula ukungcoliswa okuvela othulini, izinhlayiya, nokunye ukungcola okungase kube nomthelela ekusebenzeni nokuthembeka kwe-semicon kanye nokukhiqizwa kwe-electronics. Imvelo ehlanzekile ye-nitrogen igcina ukuhlanzeka kwezingxenye kanye nezindawo phakathi nezinqubo zokukhiqiza. Ezikhathini zokuhlanzeka kwekilasi le-100 (ISO 5) indawo yokuhlanzeka, ikhabethe elomile lensimbi engenasici lisetshenziselwa ukugcina izingxenye namathuluzi anembile.

Ikhabhinethi ye-nitrogen yensimbi engagqwali iyisixazululo esikhethekile sokulondoloza esiklanyelwe ukuvikela izingxenye ezizwelayo nezinto zokwakha ekulimaleni kwe-oxidation nomswakama ngokugcina umoya we-nitrogen ongenayo. Amakhabethe ensimbi engagqwali enziwe ngensimbi engagqwali engu-304 ephezulu, enikeza ukumelana nokugqwala okuhle kakhulu futhi kulula ukuwahlanza. Ukuqedwa kwesibuko akunikezeli nje kuphela ukubukeka kwesimanje kodwa futhi kusiza ukuhlanza nokugcinwa. Indawo ephakeme kanye nemvelo elula ukuhlanzeka yalawa makhabethe iwenza afanelekele izindawo zegumbi elihlanzekile, futhi amanye amamodeli afinyelela izinga lenhlanzeko le-Class 100.

Ikhabhinethi ye-nitrogen yensimbi engenasici ivame ukusetshenziswa ezimbonini ze-semiconductor, photonics kanye ne-FPD, isitoreji sezinto ezikhethekile kanye nemikhakha ye-elekthronikhi ukuvimbela i-oxidation, ukuhlaselwa kwemizimba yangaphandle kanye nokulawula umswakama endaweni ehlanzekile.

Ikhabhinethi yakhelwe ukulayisha okuphezulu nokuqina, ikhabethe le-nitrogen yensimbi engagqwali ifakwe ne-nitrogen inlet yokuhlanza indawo yokusebenza, ukuze kuvikelwe izinto zokulondoloza ekufakweni kwe-oxidized, yonke ikhabethe eyomile ye-N2 yenziwe ngu-SUS#304.

Ngokugcina amazinga omswakamo aphansi, amakhabethe e-nitrogen asiza ukunciphisa ukuchayeka komswakama ngesikhathi sokulondoloza kanye nokucutshungulwa kwezingxenye ze-IC. Ingakwazi ukuthuthukisa ikhwalithi ehlangene ye-solder ngokunciphisa i-oxidation nokuqinisekisa ukuxhumana okuhlanzekile, okuthembekile. Lokhu kubalulekile ekuvimbeleni ukugqwala, ukubola, noma okunye ukonakala okuhlobene nomswakama okungase kuthinte ukuthembeka kwamaphakheji e-IC.

• ● Ibanga lomswakamo:1-60%RH
• ● Amandla: 500/1020/1250/1510Liter
• ● ESD Safe