Automatic Oven

The automatic Scan-Code Oven is a multifunctional automated baking device. It features automatic door opening and closing, enabling close collaboration with AGVs or wafer handlers for automated material handling, while also supporting manual loading and unloading. With four independent chambers, each equipped with a touchscreen for customized parameter settings, the oven can meet diverse production needs. A scanning chamber is integrated to bind materials during loading and unloading, automatically retrieving baking recipes to ensure process accuracy. Moreover, it can be connected to a host computer for local data storage and processing, and communicate with the MES system to achieve intelligent production control. This makes it widely applicable in semiconductor and other fields, enhancing production efficiency and product quality.

The 9 chambers are independently controlled and share one set of vacuum system. It is suitable for all kinds of metal materials, anaerobicanaerobic, chemical raw materials, precious metals, metal powder and other solid,powder, paste, liquid, electronic products

• ● 9-Chambers standalone control
• ● Temporarily store products during the production process of electronic devices, optoelectronic devices, semiconductor chips and other devices to prevent oxidation
• ● Min.50 to 5*10-5Pa vacuum
• ● Barcode scanner to store product information