Products

High Vacuum Oven features directly heated shelves that can be programmed to heat up to 300oC.  The high vacuum chamber can easily pump down to 10-6 Torr, pumped by a turbo pump which is backed by a dry scroll pump (with no oil back-streaming to worry about). While it is very fast to heat up, the cooldown process can be slow (several hours). To preserve the interior surfaces from excessive oxidation, the chamber can only be vented once the shelves have dropped below 100oC. The chamber is vented with nitrogen. A partial vent is possible if you need to allow your sample to cool completely down to ambient temperature while in a nitrogen atmosphere. There are two approximately 11" x 11" (280 mm x 280 mm) shelves, and two custom made aluminum trays. It can bake eight 4" wafers at a time. There are no windows, so light sensitive parts can be baked as long as they are wrapped in foil on the way into the chamber.

This tunnel oven features a dual-layer design with integrated fixture loading/unloading and automated return functionality. At the infeed section, the system synchronizes with upstream automation equipment to precisely load products onto fixtures. These fixtures then transport products through the heating tunnel for controlled baking.

The discharge end incorporates downstream automation for product unloading, after which fixtures are automatically transferred to the lower return conveyor. The fixtures efficiently cycle back to the tunnel entrance for reloading, completing a continuous production loop.

By seamlessly connecting baking processes with automated material handling, this system achieves fully automated production line integration, delivering significant efficiency improvements of 30-50% compared to conventional systems.

Key advantages:

• Closed-loop fixture circulation eliminates manual handling
• Perfect synchronization with upstream/downstream equipment
• 24/7 continuous operation capability
• Production capacity: 150-1200 units/hour (configurable)

The automatic Scan-Code Oven is a multifunctional automated baking device. It features automatic door opening and closing, enabling close collaboration with AGVs or wafer handlers for automated material handling, while also supporting manual loading and unloading. With four independent chambers, each equipped with a touchscreen for customized parameter settings, the oven can meet diverse production needs. A scanning chamber is integrated to bind materials during loading and unloading, automatically retrieving baking recipes to ensure process accuracy. Moreover, it can be connected to a host computer for local data storage and processing, and communicate with the MES system to achieve intelligent production control. This makes it widely applicable in semiconductor and other fields, enhancing production efficiency and product quality.

GZ-RTP-SM-12 is a semi-automatic vertical rapid thermal processing system applied for heating single 4-12 inch wafer
Max. Temp. 1250℃
Max. 4 gas lines

GZ fast low humidity moisture proof cabinet adopts the new upgraded dehumidification module. It can reach humidity below 5%RH. The product is easy to operate. It is especially recommended for all kinds of electronic parts, cameras, cameras, general laboratory instruments, microscopes, materials and chemicals, etc.to prevent mold and mildew.

ESD dry cabinets are an essential tool in any environment where sensitive electronic components are handled, ensuring their longevity and performance by protecting them from the potentially damaging effects of static electricity. The interior of the cabinet is often lined with ESD-safe materials, such as anti-static foam or conductive plastic bins, to provide additional protection for stored items.

Nitrogen cabinets can help control contamination from dust, particles, and other impurities that could impact the performance and reliability of semicon and electronics production. The clean nitrogen environment maintains the purity of the components and surfaces during manufacturing processes. For occasions in class 100 (ISO 5) cleanness environment, fully mirror stainless steel dry cabinet is used to store precise components and instruments.

A stainless steel nitrogen cabinet is a specialized storage solution designed to protect sensitive components and materials from oxidation and moisture damage by maintaining an inert nitrogen atmosphere. Stainless steel cabinets are made from high-quality 304 stainless steel, which offers excellent corrosion resistance and is easy to clean. The mirrored finish not only provides a modern appearance but also facilitates cleaning and maintenance. The high surface finish and easy-to-clean nature of these cabinets make them suitable for cleanroom environments, with some models even meeting the cleanliness standard of Class 100

Stainless steel nitrogen cabinet is commonly use in the semiconductor, photonics and FPD industries, special materials storage and electronic sectors to prevent oxidation, attack of foreign bodies and humidity control in a clean environment.

The cabinet is designed for maximum load and durability, Stainless steel nitrogen cabinet is installed with a nitrogen inlet to purge working area, so as to protect storage items from being oxidized, the whole N2 dry cabinet is made by SUS#304.

By maintaining low humidity levels, nitrogen cabinets help minimize moisture exposure during storage and processing of IC components. It can improve solder joint quality by reducing oxidation and ensuring clean, reliable connections. This is crucial for preventing corrosion, delamination, or other moisture-related defects that can affect the reliability of IC packages.

• ● Humidity Range:1-60%RH
• ● Capacity: 500/1020/1250/1510Liter
• ● ESD Safe

Clean ovens are used extensively in heat treatment or drying of semiconductor wafers, liquid crystals, disks and other components and devices requiring clean air conditions.

• ● Class 100
• ● 350L large capacity
• ● Max. temperature 260℃

Essential for general heating routines — from drying samples to curing microchips, a precise oven is one of the fundamental instruments every laboratory or workshop should have. GMS truck-in industrial ovens accommodate a variety of thermal processing applications up to 250℃. Our industrial truck-in ovens are ideally suited for drum heating, aging, core hardening, drying, preheating, curing, and component testing. With additional options, these truck-in industrial ovens can also be used for applications such as paint baking, plastic curing, varnish baking, sterilizing, and rubber，silica gel and epoxy curing. Trucks provide a quick and efficient way to load and unload products. Single, double, triple, and quadruple bay trucks are available to match any product load.