Inert Gas Oven

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Ultra-High Temperature Inert Gas Oven for V Debinding Process

Dual-Chamber High-Temperature Vacuum Oven Technical Specifications

1250L ESD Safe Nitrogen Cabinet

1020L ESD Safe Nitrogen Cabinet

500L Sustainless Steel Nitrogen Cabinet

0102030405

Ultra-High Temperature Inert (Anaerobic) Gas Oven

Suitable for curing semiconductor wafers (photoresist PI, PBO, BCB curing), glass substrate baking, and high-precision annealing treatment, etc.

Max. working temperature: 360℃, 600℃.
Oxygen concentration lower than 20 ppm.

Featuresproduct

The ultra-high temperature anaerobic oven uses a proprietary chamber structure and sealing technology, with excellent temperature uniformity, while also ensuring higher stability and reproducibility. At the same time, the external cooling mechanism circulating by the cooling water can cool down quickly without affecting the atmosphere in the furnace, thus shortening the treatment time.

、lded and sealed construction assures continuously low air loss

●Corrosion-resistant, stainless steel (type 304) interior

●Adjustable inert gas purge system including a flowmeter and supply connection

●Fiberglass insulation to ensure safe cabinet skin temperature

Independent, over-temperature protection

●Circuit breaker provided for ground fault protection as standard

vv High volume horizontal air recirculation system and electric heating system allow for maximum temperature uniformity in performance

●Excellent reliability and performance ratings

Optionsproduct

●Shelves

●Vacuum Pump

●HEPA Filter

●Temperature recorders (paper or paperless)

●Ethernet communications

Applicationsproduct

●Aging

●Annealing

●Testing

●Curing

Industriesproduct

●Aerospace

●Automotive

●Defense

●Electronics

●Research & Development

●Rubbers & Plastics

●Semiconductors

●Telecom

●Optical Communication

Customizationproduct

GMS can provide varying levels of uniformity, size, temperature range; if you have a specific tolerance or specification which must be met, please contact us with your requirements so we can ensure the equipment is designed, tested, and adjusted to meet those requirements.

Product Parametersproduct

Model	GZ-OXY-360C-A	GZ-OXY-360C-B	GZ-OXY-600C-A	GZ-OXY-600C-B
Temp. Range	Room temp. +50~360°C		Room temp. +100~600°C
Control accuracy	+/- 1.0°C		+/- 1.0°C
Temp. Distribution Accuracy	±5°C @360°C (empty load)		±9°C @600°C (empty load)
Interior Dimensions HxWxD(mm)	450x450x450	600x600x600	450x450x450	600x600x600
Exterior Dimensions HxWxD(mm)	1540 x1090 x950	1720x1240 x1100	1750x1240x1010	1900x139x1160
Shelves	2 plates	4 plates	2 plates	4 plates
Workspace Capacity	91L	216L	91L	216L
Cooling System	Water-cooling system
Control System	LCD touch screen with PLC
Safety Device	Door detector switch, overheat protector, oxygen content monitor, low water pressure detection, low gas pressure detection, fan overload detection, overcurrent ELB etc.
Power Supply	3 phase AC 380V or as request

●Adjustable inert gas purge system including a flowmeter and supply connection

●Fiberglass insulation to ensure safe cabinet skin temperature

●Independent, over-temperature protection

●Circuit breaker provided for ground fault protection as standard

●High volume horizontal air recirculation system and electric heating system allow for maximum temperature uniformity in performance

●Excellent reliability and performance ratings

Serviceproduct

GMS Industrial has markets, sales, technical service and network team to provide customers and dealers with comprehensive pre-sales, in-sales and after-sales services. You can communicate with us if you have any questions and requirements.
24 hours online. Messages will be replied as soon as they are received.

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Ultra-High Temperature Inert Gas Oven for V Debinding Process

Dual-Chamber High-Temperature Vacuum Oven Technical Specifications

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