Ultra High Vacuum Oven

High Vacuum Oven features directly heated shelves that can be programmed to heat up to 300oC. The high vacuum chamber can easily pump down to 10-6 Torr, pumped by a turbo pump which is backed by a dry scroll pump (with no oil back-streaming to worry about). While it is very fast to heat up, the cooldown process can be slow (several hours). To preserve the interior surfaces from excessive oxidation, the chamber can only be vented once the shelves have dropped below 100oC. The chamber is vented with nitrogen. A partial vent is possible if you need to allow your sample to cool completely down to ambient temperature while in a nitrogen atmosphere. There are two approximately 11" x 11" (280 mm x 280 mm) shelves, and two custom made aluminum trays. It can bake eight 4" wafers at a time. There are no windows, so light sensitive parts can be baked as long as they are wrapped in foil on the way into the chamber.

Featuresproduct

●Baking oxygen or water vapor sensitive polymer coatings in vacuum environment
●Baking out metal films without oxidizing the surface
●Low temperature metal contact annealing in high vacuum
●Drying out moisture from materials
●Driving off adsorbed water vapor from wafer surfaces
●Fully cross-linking polyimide under vacuum
●Baking assemblies which will go into other vacuum stations
●Flip chip solder reflowing

Product Parametersproduct

Performances	Model	GZ-BDT-VC-01
	Temp. Range	40-300ºC
	Pressure Range	10^-6 Torr
	Maximum Temp. Reach Time	About 20-30 minutes
Form	Temp. Regulation Accuracy	±1ºC
	Internal Material	1.5mm stainless steel plate full argon arc welding
	External Material	Cold rolled sheet, drug resistant coating on surface
	Heat-resistant Material	Glass fiber
	Heating Method	Direct heating of the pressure tank wall
	Total Power	8.5KW
Control Method	Program Operation and Status	7-inch LCD touch screen control
	Temp. Control Method	Multi-segment PID algorithm, temperature control accuracy ±0.1ºC
	Temp. Setting Method	Digital setup using dedicated operation function menu keys and up/down keys
	Operational Function	Fixed-value operation, programmed operation, auto-stop operation, auto-start operation
	Program Mode	Customizable upon request
	Additional Feature	Deviation correction function, key lock function, power failure compensation function
	Heater Loop Control	SSR driver + PIH
	Sensor	PT100 Thermocouple
Safety Equipment		Self-diagnostic circuit (temperature sensing abnormality, heater disconnection, automatic overshoot prevention, SSR short circuit) Overshoot prevention, leakage protection switch for overcurrent, key lock function
Sizes	Internal Size(HWD/mm)	320320320mm, shelf size (280*280)mm
	Power Current	AC380V 23A(50Hz/60Hz)
	Weight	About 426KG

Serviceproduct

GMS Industrial has markets, sales, technical service and network team to provide customers and dealers with comprehensive pre-sales, in-sales and after-sales services. You can communicate with us if you have any questions and requirements.
24 hours online. Messages will be replied as soon as they are received.

inquiry now